Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Examiner
active
No affiliations
Alternating current rotatable sputter cathode
Alternating current rotatable sputter cathode
Alternating current rotatable sputter cathode
Aluminum sputtering while biasing wafer
Aluminum sputtering while biasing wafer
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Profile ID: LFUS-PAI-P-1983192