4. Heat exchange
  5. Intermediate fluent heat exchange material receiving and...
  6. Liquid fluent heat exchange material

Rodney Arthur Kendall

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Cooling method and apparatus for charged particle lenses and def

Heat exchange – Intermediate fluent heat exchange material receiving and... – Liquid fluent heat exchange material
Patent

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Heater for membrane mask in an electron-beam lithography system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Non-contact autofocus height detector for lithography systems

Radiant energy – Calibration or standardization methods
Reexamination Certificate

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Pinhole detector for electron intensity distribution

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Removable bombardment filament-module for electron beam...

Electric lamp and discharge devices – With electrode replacement means or demountable
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1150776

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