Cooling method and apparatus for charged particle lenses and def

Details Cooling method and apparatus for charged particle lenses and def Cooling method and apparatus for charged particle lenses and def

1998-09-17

2000-04-25

Lazarus, Ira S.

Heat exchange

Intermediate fluent heat exchange material receiving and...

Liquid fluent heat exchange material

165 804, 250396ML, F28D 1500

Patent

active

060532416

ABSTRACT:
A method of cooling a deflection system for a particle beam, containing vibration sensitive deflection devices comprises providing a vibrating cooled heat exchange structure spaced away from the vibration sensitive deflection devices. The technique used is transmission of the heat away from the vibration sensitive devices to the heat exchange structure through a high thermal conductivity structure such as a cold plate. The heat is transmitted from a static heat exchange structure with a static, inert fluid through cold plates to a vibrating heat exchanger cooled by turbulent liquid passing through a cooling coil in the heat exchanger.

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