4. Material or article handling
  5. Horizontally swinging load support
  6. Swinging about pivot

Robert Lowrance

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Robot assembly

Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent

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Profile ID: LFUS-PAI-P-697693

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