4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Robert Kenneth Leidy

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Alignment targets having enhanced contrast

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Patent

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Alignment targets having enhanced contrast

Semiconductor device manufacturing: process – Semiconductor substrate dicing – Having specified scribe region structure
Reexamination Certificate

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Dishing and erosion monitor structure for damascene metal proces

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Dishing and erosion monitor structure for damascene metal proces

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent

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Method and structure for reducing microelectronic short circuits

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-511670

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