4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...

Robert Hölzl

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Process for the heat treatment of a silicon wafer, and...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Silicon wafer and process for producing it

Active solid-state devices (e.g. – transistors – solid-state diode – With specified dopant – Deep level dopant
Reexamination Certificate

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SOI wafer and process for producing it

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2774536

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