4. Semiconductor device manufacturing: process
  5. With measuring or testing

Robert A. Huertas

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H2-or H2/N2-plasma treatment to prevent organic ILD degradation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP deposition hillock suppression method in integrated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP treatment for reduced nickel silicide bridging

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Interlayer dielectric for charge loss improvement

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Low dielectric constant etch stop layers in integrated...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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