4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Robert A. Ditizio

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Deposition shield for a plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate

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Dry etch stop process for eliminating electrical shorting in...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Plasma reactor with a deposition shield

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Plasma reactor with a deposition shield

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Plasma reactor with a deposition shield

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1980997

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