4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Rick A. Lutz

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Double-sided wafer scrubber with a wet submersing silicon wafer

Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent

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Method for wafer scrubbing

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Profile ID: LFUS-PAI-P-1862202

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