Double-sided wafer scrubber with a wet submersing silicon wafer

Details Double-sided wafer scrubber with a wet submersing silicon wafer Double-sided wafer scrubber with a wet submersing silicon wafer

1992-11-30

1995-08-22

Skaggs, H. Grant

Brushing, scrubbing, and general cleaning

Machines

Brushing

221 79, 221 88, 221135, 221278, 221226, 221 6, A47L 2500, B65H 308

Patent

active

054428289

ABSTRACT:
An embodiment of the present invention is a wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.

REFERENCES:
patent: 3136697 (1964-06-01), Arnold et al.
patent: 3976330 (1976-04-01), Babinski et al.
patent: 4034869 (1977-07-01), Stange et al.
patent: 4326643 (1982-04-01), Bayne et al.
patent: 4391387 (1983-07-01), Bayne et al.
patent: 4874273 (1989-10-01), Tokisue et al.

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