Method for wafer scrubbing

Details Method for wafer scrubbing Method for wafer scrubbing

1995-03-03

1996-06-25

Silbaugh, Jan H.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 18, 134 254, 134 32, 134 34, B08B 700, B08B 704

Patent

active

055296386

ABSTRACT:
A wet indexer for receiving a cassette of wafers from a previous processing station that have not been allowed to dry. The wet indexer then keeps the wafers submersed in processing solution before and during indexed transmission to later cleaning stations.

REFERENCES:
patent: 3664872 (1972-05-01), Frank et al.
patent: 3970471 (1976-07-01), Bankes et al.
patent: 4557785 (1985-12-01), Ohkuma

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