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Richard Blume

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Details Richard Blume Richard Blume

: Etching a substrate: processes
: Gas phase etching of substrate
: Application of energy to the gaseous etchant or to the...

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Adjusting DC bias voltage in plasma chamber

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Reexamination Certificate

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Adjusting DC bias voltage in plasma chamber

Coating apparatus – Gas or vapor deposition – With treating means

Reexamination Certificate

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Adjusting DC bias voltage in plasma chambers

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Encapsulated fastener

Expanded – threaded – driven – headed – tool-deformed – or locked-thr – Headed fastener element with nut – washer – securing means or cap – Headed bolt or screw with threads and complementary nut

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Profile ID: LFUS-PAI-P-1421282

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