Richard A. Rosenberg

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Apparatus for inspecting a phase shift mask

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Hidden change distribution grating and use in 3D moire measureme

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Large aperture phased element modulator/antenna

Patent

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Nulling optical bridge for measurement of changes in reflectivit

Optics: measuring and testing – Of light reflection – By comparison
Patent

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Profile ID: LFUS-PAI-P-482195

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