Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1992-09-08
1994-06-07
Rosenberg, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
250237G, G01B 1124
Patent
active
053194454
ABSTRACT:
A high-speed three-dimensional surface measurement system for use in determining the surface of an object from at least one electronic signal produced by a mini-moire sensor. At least one light source illuminates at least a surface area of the object with at least one fringe pattern. The light source has a hidden change distribution grating or matrix of gratings for producing the fringe pattern. The grating has hidden variations distributed substantially across the grating. The grating has a pseudo-random grating pattern in which a nominal fringe pattern has a small uniform period with the hidden variations distributed statistically across the grating. The hidden variations are so small that at any one point on the grating a noise-like value of the hidden variations is on the order of an overall noise equivalent phase value. A CCD camera receives reflected illumination from the surface area and provides an electronic signal representative of reflected illumination received thereby.
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