4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Renn-Shyan Yeh

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Method and system for yield loss analysis by yield management sy

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Method and system for yield loss analysis by yield...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method for determining a cause for defects in a film deposited o

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Patent

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Method for determining stress effect on a film during...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Indicating coating or sheet providing direct visual indication
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1638706

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