4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Rene de Blank

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High stress nitride film and method for formation thereof

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Method for semiconductor processing using mixtures of HF and car

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Protection of conductors from oxidation in deposition chambers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1932717

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