4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Reima T. Laaksonen

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Formation of nitrogen containing dielectric layers having a...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Formation of nitrogen containing dielectric layers having a...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Method to obtain uniform nitrogen profile in gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Polysilicon processing using an anti-reflective dual layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Polysilicon processing using an anti-reflective dual layer...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-772184

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