Coherent light generators – Particular resonant cavity – Specified cavity component
Reexamination Certificate
2007-10-02
2007-10-02
Rodriguez, Armando (Department: 2828)
Coherent light generators
Particular resonant cavity
Specified cavity component
C372S058000
Reexamination Certificate
active
10820261
ABSTRACT:
A helium purge for a grating based line narrowing device for minimizing thermal distortions in line narrowed lasers producing high energy laser beams at high repetition rates. Applicants have shown substantial improvement in performance with the use of helium purge as compared to prior art nitrogen purges. In preferred embodiments a stream of helium gas is directed across the face of the grating. In other embodiments the purge gas pressure is reduced to reduce the optical effects of the hot gas layer.
REFERENCES:
patent: 5095492 (1992-03-01), Sandstrom
patent: 6192064 (2001-02-01), Algots et al.
patent: 6240110 (2001-05-01), Ershov
patent: 6496528 (2002-12-01), Titus et al.
patent: 6778584 (2004-08-01), Partlo et al.
patent: 04-314374 (1992-11-01), None
patent: 04076976 (1992-11-01), None
patent: 404314374 (1992-11-01), None
patent: 05-167172 (1993-02-01), None
patent: 05-167172 (1993-07-01), None
patent: 405167172 (1993-07-01), None
Cybulski Raymond F.
Ershov Alexander I.
Fomenkov Igor V.
Partlo William N.
Sandstrom Richard L.
Cray William
Cymer Inc.
Rodriguez Armando
LandOfFree
High power gas discharge laser with helium purged line... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High power gas discharge laser with helium purged line..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High power gas discharge laser with helium purged line... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3890928