4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Raman Gobichettipalayam Viswanathan

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Formation of ultra-shallow semiconductor junction using microwav

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Formation of ultra-shallow semiconductor junction using...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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High-aspect ratio resist development using safe-solvent...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Membrane mask structure, fabrication and use

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Microwave annealing

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
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Profile ID: LFUS-PAI-P-1730555

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