4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Ram K. Ramamurthi

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Apparatus for fabricating spherical shaped semiconductor integra

Coating apparatus – Gas or vapor deposition
Patent

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Inductively coupled plasma powder vaporization for fabricating i

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Inductively coupled plasma powder vaporization for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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