Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
active
Aluminum interconnects with metal silicide diffusion barriers
Aluminum-filled self-aligned trench for stacked capacitor struct
Aluminum-filled self-aligned trench for stacked capacitor...
Aluminum-filled self-aligned trench for stacked capacitor...
Aluminum-filled self-aligned trench for stacked capacitor...
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