4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Qing Qian

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Apparatus to decelerate and control ion beams to improve the...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2288042

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