4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By vapor phase surface reaction

Ponce Saopraseuth

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Capacitor with stoichiometrically adjusted dielectric and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Capacitor with stoichiometrically adjusted dielectric and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Control of reaction rate in formation of low k...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Process for forming a low k carbon-doped silicon oxide...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Process for removal of resist mask over low k carbon-doped...

Semiconductor device manufacturing: process – Gettering of substrate – By vapor phase surface reaction
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2572036

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