4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Ping-Ho Lo

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Method of fabricating a kink-effect-free shallow trench isolatio

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Method of fabricating shallow trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1347338

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