Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-03-21

2006-03-21

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000, C359S291000, C359S292000

Reexamination Certificate

active

07016014

ABSTRACT:
A diffractive optical MEMS device includes a plurality of parallel planar reflective surfaces and an actuator system. The actuator system is used to adjust the position of each of the planar reflectors in a direction perpendicular to the planar reflectors to change characteristics (e.g., phase, intensity, etc.) of light interacting with the device.

REFERENCES:
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5539568 (1996-07-01), Lin et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5841579 (1998-11-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6433917 (2002-08-01), Mei et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6707534 (2004-03-01), Bjorklund et al.
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6870601 (2005-03-01), Liebregts et al.
patent: 2004/0001257 (2004-01-01), Akira et al.
patent: 2004/0027667 (2004-02-01), Deutsch et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0239908 (2004-12-01), Bleeker et al.
patent: 2004/0246559 (2004-12-01), Tamada et al.
patent: 2005/0068511 (2005-03-01), Liebregts et al.
patent: 1472036 (2004-02-01), None
patent: 137036 (2003-12-01), None
patent: 1 482 375 (2004-12-01), None
European Search Report for European Application No. 05251078.1 mailed on Jun. 27, 2005, pp. 1-4.
Dialog File, Derwent English language abstract for CN1472036, 1 page.

Affiliated with

Also associated with

Rating

Lithographic apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3532052