Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2008-01-29

2008-01-29

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S067000, C355S077000

Reexamination Certificate

active

07324186

ABSTRACT:
An arrangement for adjusting the position on a substrate of a patterned beam generated by a light engine relative to the substrate. The arrangement moves an array of focusing elements, each of which focuses a portion of the patterned beam onto a point on the substrate, relative to an array of individually controllable elements to impart the pattern to the patterned beam.

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Dialog File 351, Derwent WPI English language abstract for FR 2837937, Oct. 3, 2003.

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