4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Phillip Daniel Matz

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Method for using a modified post-etch clean rinsing agent

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Reduction of punch-thru defects in damascene processing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3242518

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