Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
Reexamination Certificate
2005-03-01
2005-03-01
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Length, distance, or thickness
C702S085000
Reexamination Certificate
active
06862545
ABSTRACT:
A method for calibrating a linewidth measurement tool and a system for calibrating the linewidth measurement tool each employ a correction of a series of periodic actual measurements of at least one single measurement location of a topographic feature within a linewidth standard with an exponentially weighted moving average of a series of deviations of the series of periodic actual measurements from a corresponding series of regressed data points derived from mathematical regression of the series of periodic actual measurements. Such a correction provides for a more accurate calibration of the linewidth measurement tool and a more accurate measurement of linewidths within microelectronic products while employing the calibrated linewidth measurement tool.
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Chen Yi-Hung
Fuh Chen-Ning
Lee Pey-Yuan
Lee Wen-Chung
Lo Chi-Shen
Barlow John
Taiwan Semiconductor Manufacturing Co. Ltd
Tung & Associates
Washburn Douglas N
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