4. Photocopying
  5. Projection printing and copying cameras
  6. Focus or magnification control

Petrus Johannes Maria Broodbakker

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Lithographic apparatus, level sensor, method of inspection,...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Off-axis leveling in lithographic projection apparatus

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2874635

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