Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-07-24
2007-07-24
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S072000, C250S201200
Reexamination Certificate
active
10756841
ABSTRACT:
A level sensor for a lithographic projection apparatus according to one embodiment of the invention includes a light source, a first reflector, a second reflector and a detector. The first reflector is positioned to direct light from the light source towards a wafer surface, and the second reflector is positioned to direct light reflected from the wafer surface to the detector. The first and second reflectors are selected to incur a minimal process dependent apparent surface depression.
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Broodbakker Petrus Johannes Maria
Queens Rene Marinus Gerardus Johan
Teunissen Paulus Antonius Andreas
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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