Lithographic apparatus, level sensor, method of inspection,...

Details Lithographic apparatus, level sensor, method of inspection,... Lithographic apparatus, level sensor, method of inspection,...

2007-07-24

2007-07-24

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S072000, C250S201200

Reexamination Certificate

active

10756841

ABSTRACT:
A level sensor for a lithographic projection apparatus according to one embodiment of the invention includes a light source, a first reflector, a second reflector and a detector. The first reflector is positioned to direct light from the light source towards a wafer surface, and the second reflector is positioned to direct light reflected from the wafer surface to the detector. The first and second reflectors are selected to incur a minimal process dependent apparent surface depression.

REFERENCES:
patent: 3360324 (1967-12-01), Hora
patent: 4558949 (1985-12-01), Uehara et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5323016 (1994-06-01), Yamada et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5985495 (1999-11-01), Okumura et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6191429 (2001-02-01), Suwa
patent: 6195154 (2001-02-01), Imai
patent: 6400441 (2002-06-01), Nishi et al.
patent: 2002/0000520 (2002-01-01), Kawaguchi
patent: 2002/0036762 (2002-03-01), Nishi
patent: 2003/0090804 (2003-05-01), Kotchick
patent: 2004/0000627 (2004-01-01), Schuster
patent: 1 037 117 (2000-09-01), None
patent: 1 162 483 (2001-12-01), None
patent: 1 170 636 (2002-01-01), None
patent: 1 357 435 (2003-10-01), None
patent: 1-303721 (1989-12-01), None
patent: 5-166703 (1993-07-01), None
patent: 2001-296105 (2001-10-01), None
patent: WO 98/33906 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
European Search Report dated Dec. 19, 2003.
English language translation of Japanese Office Action dated Aug. 19, 2005.
Goos et al., “A new and fundamental experiment on total reflection”, Ann. Phys. 1 (6), pp. 333-346 (1947).

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