Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-08-02
2005-08-02
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S075000
Reexamination Certificate
active
06924884
ABSTRACT:
In an off-axis leveling procedure a height map of a mask is generated at a measurement station. The height map is referenced to a physical reference surface of a mask support. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of the mask support to position the exposure area on the mask in best focus during exposure.
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Boonman Marcus Emile Joannes
Broodbakker Petrus Johannes Maria
Nijmeijer Gerrit Johannes
Roijers Jozef Cornelus Antonius
Zong Mingcheng
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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