4. Coating apparatus
  5. Gas or vapor deposition

Peter Wai-Man Lee

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Adhesion improvement for low k dielectrics

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Adhesion improvement for low k dielectrics

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Apparatus for depositing low dielectric constant oxide film

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Chemical vapor deposition of a copolymer of p-xylylene and a mul

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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CVD plasma assisted lower dielectric constant SICOH film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-607336

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