Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1998-06-15
2000-07-11
Meeks, Timothy
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4272556, 438780, C23C 1600
Patent
active
060869526
ABSTRACT:
A method for forming thin polymer layers having low dielectric constants or semiconductor substrates. In one embodiment, the method includes the vaporization of stable di-p-xylylene, the pyrolytic conversion of such gaseous dimer material into reactive monomers, and blending of the resulting gaseous p-xylylene monomers with one or more comonomers having silicon-oxygen bonds and at least two pendent carbon--carbon double bonds. The copolymer films have low dielectric constants, improved thermal stability, and excellent adhesion to silicon oxide layers in comparison to parylene-N homopolymers.
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Chang Fong
Cheung David
Jeng Shin-Puu
Lang Chi-I
Lee Peter Wai-Man
Applied Materials Inc.
Meeks Timothy
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