Method and apparatus for stabilizing the frequency of a laser be

Details Method and apparatus for stabilizing the frequency of a laser be Method and apparatus for stabilizing the frequency of a laser be

1988-12-22

1990-02-27

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Optical output stabilization

372102, 372 28, 372 38, H01S 313

Patent

active

049052438

ABSTRACT:
For stabilizing the frequency of a narrow-band Excimer laser beam the interference rings of a Fabry-Perot interferometer 16 are projected onto a solid-state image sensor 18 and by means of the solid-state image sensor an electrical signal is generated which is dependent on the frequency of the laser beam. The electrical signal is compared with a stored reference signal to derive an adjusting signal 32 for an optical reflection grating 38 with which the frequency of the laser beam 12 is regulated to a desired value. The absolute value of the frequency of the laser beam 12 is determined by means of the optogalvanic effect.

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Babin et al., Optics Letters (1987) 12(7) :468-471.
Demtroder, "Fundamentals and Techniques of Laser Spectroscopy", Spring Publishers, 1977, pp. 71-72, 108, 113-119.
Dovichi et al., Appl. Optics (1982) 21(8): 1468-1473.

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