4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Peter F. Kurunczi

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Ion source cleaning end point detection

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for controlling beam current uniformity...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Monochromatic vacuum ultraviolet light source for...

Electric lamp and discharge devices – With support and/or spacing structure for electrode and/or... – For plural electrodes of discharge device
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Profile ID: LFUS-PAI-P-2239252

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