4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor

Per-Olov Pettersson

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Power distribution for CMOS circuits using in-substrate...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Vertical electrical device

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2169867

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