4. Gas and liquid contact apparatus
  5. Contact devices
  6. Liquid tank

Pekka T. Soininen

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Apparatus for fabrication of thin films

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for fabrication of thin films

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for fabrication of thin films

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus for growing thin films

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Apparatus for growing thin films

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2309332

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