4. Coating processes
  5. Centrifugal force utilized

Paul Shirley

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Method and apparatus for a two-step resist soft bake to...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Method for forming a thin uniform layer of resist for lithograph

Radiation imagery chemistry: process – composition – or product th – Use of sound or nondigital compressive force
Patent

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Method for forming a thin uniform layer of resist for lithograph

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Processing feature prior to imaging
Patent

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Process liquid dispense apparatus

Coating apparatus – Program – cyclic – or time control
Reexamination Certificate

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Process liquid dispense method and apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to attribute – absence or presence of work
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Profile ID: LFUS-PAI-P-625554

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