4. Gas separation: apparatus
  5. Electric field separation apparatus
  6. Electrode cleaner, apparatus part flusher, discharger, or...

Paul P. Castrucci

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Apparatus and method for semiconductor wafer cleaning

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Method for laser cleaning of a substrate surface using a...

Semiconductor device manufacturing: process – Laser ablative material removal
Reexamination Certificate

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Process for increasing mask life

Gas separation: apparatus – Electric field separation apparatus – Electrode cleaner – apparatus part flusher – discharger – or...
Patent

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Profile ID: LFUS-PAI-P-433463

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