Semiconductor device manufacturing: process – Laser ablative material removal
Reexamination Certificate
2005-04-19
2005-04-19
Pham, Long (Department: 2814)
Semiconductor device manufacturing: process
Laser ablative material removal
C134S001000, C219S068000, C219S085200
Reexamination Certificate
active
06881687
ABSTRACT:
An improved semiconductor wafer processing apparatus10includes a series of processing stations combined in one form, coupled together by computer-controlled cluster tooling. Wafers are supplied in a pod to an input station28which initiates a data record for recording processing results at each station. A sacrificial film140is applied to the surface135of each wafer. Individual wafers are transferred to a computer-controlled defect-mapping station14where particulate defects130are identified and their position coordinates recorded. Defect-mapped wafers are transferred to a computer-controlled laser area cleaning station11which lifts the defects and sweeps the wafer surface clean, except for stubborn defects. Clean wafers are transferred to a final mapping station20or22, followed by transfer of the wafers to an output station30. Wafers having remaining stubborn defects are transferred to a second defect-mapping station16where stubborn defects are located by coordinates, after which the wafers are transferred to a defect review tool incorporating a scanning electron microscope (SEM-DRT)24. A SEM image review of stubborn defects includes chemical analysis of the stubborn defects. A laser point-cleaning station13lifts and sweeps each stubborn defect individually from the wafer surface. Cleaned wafers are transferred to a third defect-mapping station18for recording any stubborn defects remaining, then to a second laser area cleaning station12for a final cleaning, followed by transfer of the wafers to a final mapping station20or22for mapping of any remaining stubborn defects. The accompanying data records are updated followed by transfer of the wafers to an output station30.
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AKC Patents LLC
Collins Aliki K.
Duy Mai Anh
Pham Long
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