4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Paul Kwok Keung Ho

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Apparatus and methods to clean copper contamination on wafer...

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Application of vapor phase HFACAC-based compound for use in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chlorine containing plasma etch method with enhanced sidewall pa

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Copper diffusion deterrent interface

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Method and apparatus for removing contaminants from the...

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
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Profile ID: LFUS-PAI-P-1952570

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