4. Paper making and fiber liberation
  5. Processes and products

Paul Fathauer

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Gradient polishing pad made from paper-making fibers for use...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Method for securing a polishing pad to a platen for use in...

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Polishing pad for use in chemical—mechanical...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Polishing pad for use in chemical-mechanical planarization...

Abrading – Flexible-member tool – per se – Comprising fibers
Reexamination Certificate

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Polishing pad for use in chemical-mechanical planarization...

Paper making and fiber liberation – Processes and products
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2819150

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