Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2005-11-15
2005-11-15
Wilson, Lee D. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S285000, C451S490000
Reexamination Certificate
active
06964601
ABSTRACT:
The present invention is related to a method for securing a polishing pad to the platen for use in chemical-mechanical polishing. Specifically, a polishing pad is attached to a platen using a reclosable, hook-and-pile fastener, whereby the platen-attachment fastener may be reused. Separate embodiments are disclosed for attaching porous and nonporous polishing pads.
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Cooper Richard D.
Fathauer Paul
Macey James
Perry David
Petroski Angela
Freed Much Shelist
Gerstein Milton S.
Ojini Anthony
Raytech Innovative Solutions LLC
Wilson Lee D.
LandOfFree
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