4. Electric heating
  5. Metal heating
  6. By arc

Paul Corkum

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Fabrication of long range periodic nanostructures in...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Method of fabricating sub-micron structures in transparent...

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Methods for creating optical structures in dielectrics using...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2828880

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