4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Patrick K. Thomas

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Dry etching of multi-layer structures

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Process for forming an integrated circuit

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-772470

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