4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. On insulating substrate or layer

Patrick Jerier

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Method of epitaxy on a silicon substrate comprising areas heavil

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Method of epitaxy on a silicon substrate comprising areas...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Method of epitaxy on a silicon substrate comprising areas...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Reexamination Certificate

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