4. Electric heating
  5. Metal heating
  6. By arc

Patrick Halahan

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Plasma generator ignition circuit

Electric heating – Metal heating – By arc
Patent

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Plasma processing comprising three rotational motions of an...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Thinning and dicing of semiconductor wafers using dry etch,...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1218311

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