4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Pamela Trammel

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Isolation scheme based on recessed locos using a sloped Si etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method and structure for isolating integrated circuit...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-581387

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