4. Coating apparatus
  5. Gas or vapor deposition

Padmanabhan Krishnaraj

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Apparatus and method for detecting an end point of chamber...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Deposition process for high aspect ratio trenches

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Deposition-selective etch-deposition process for dielectric...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Electrostatic chuck and method for fabricating the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Gas delivery system for semiconductor processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Profile ID: LFUS-PAI-P-1585796

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