4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Grooved and refilled with deposited dielectric material

Osamu Sugawara

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Scan chain extracting method, test apparatus, circuit...

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
Reexamination Certificate

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Semiconductor device having a shallow isolation trench

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2620538

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